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With a constant drive for miniaturization, higher speed and lower cost, chip manufacturing is an ongoing challenge that pushes the engineering envelope. For the entirety of our history, semiconductor production equipment has been one of our strong suits. Both in front-end and back-end as well as in metrology and measurement tools. We have a long track record, developing and realizing customized modules and machines for many of the world’s biggest OEM’s in semicon equipment. Our scope stretches from positioning and deposition modules to mask and wafer inspection tools, extending to advanced packaging solutions.
We offer end-to-end engineering as a service for semicon manufacturing equipment, from early-phase research and concept development to prototyping, validation and production. Customers can pick and choose the extent of our involvement. We will balance out performance, cost of ownership and time to market, according to your specific demands.
With our experience in developing positioning systems for semiconductor equipment for the EUV node, we have developed a technology platform. This platform consists of a library of technologies, components and sub-modules that can be combined into a customized ultra-high precision substrate positioning system. The availability of these libraries strongly reduces the development time and costs of customized nanometer-precision stages.

Demcon offers end-to-end engineering as a service for semicon manufacturing equipment, from early-phase research and concept development to prototyping, validation and production. Customers can pick and choose the extend of our involvement. We will balance out performance, cost of ownership and time to market, according to your specific demands.
We believe in the power of partnerships. So, to deliver as promised, we combine expertise, experience, and domain knowledge to create a winning team. Working side-by-side, creating shared value.



Demcon high-tech systems is developing a passive de-orbiter: a lightweight, inflatable sail that increases drag at the end of a mission and allows satellites to decelerate in a controlled manner until they burn up in the atmosphere.
Read more![Figure 1. Reluctance actuator with a permanent magnet placed parallel to the mover. [a] The current in the coil is negative and the flux of the coil (black) and the permanent magnet (red) are parallel in the stator. [b] The current is positive and the fluxes are anti-parallel, leading to a suppression of the magnetic saturation.](/.img/animated_true&extract_84_0_553_553&f_jpeg&s_1600x1600/dam/jcr:33cfc864-617d-4d58-8708-05de099ad73d/1b.jpg)
![Figure 1. Reluctance actuator with a permanent magnet placed parallel to the mover. [a] The current in the coil is negative and the flux of the coil (black) and the permanent magnet (red) are parallel in the stator. [b] The current is positive and the fluxes are anti-parallel, leading to a suppression of the magnetic saturation.](/.img/animated_true&extract_0_96_722_361&f_jpeg&s_1600x800/dam/jcr:33cfc864-617d-4d58-8708-05de099ad73d/1b.jpg)
Electromagnetic actuators are an important actuation tool to achieve positioning precision on the nanometer scale. In this realm Lorentz actuators are the mostly used, due to their linear dependence between actuation force and applied current.
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The performance of precision mechanisms can be limited by disturbing vibrations that are amplified at parasitic eigenfrequencies. Piezoelectric patches that are integrated into flexures have been shown to be a promising approach for actively suppressing parasitic modes.
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In this article, we present the model-based design steps for a high-performance vibration isolation system to support a metrology frame. During the design phase, several improvements were shown to increase the vibration isolation performance.
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