Metrology &
Inspection
We design metrology systems that push the limits of accuracy, stability
and automation, both in R&D environments and in-line production.
Also including:
Optical, X-ray, acoustic, e-beam and hybrid metrology
Topography, surface and defect inspection
Inline and online measurement systems
Precision alignment and calibration equipment
Key competences
- Nanometer-level positioning and vibration control
- Environmental control (thermal, vacuum, cleanliness)
- Precision stages, frames and metrology structures
- Measurement and control algorithms
- Laser‑based systems, including laser delivery, beam shaping, alignment and stability for metrology, inspection and material interaction applications
















